Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range
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Published in Journal of nanoscience and nanotechnology (01.01.2019)
Published in Journal of nanoscience and nanotechnology (01.01.2019)
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KORTES Mission for Solar Activity Monitoring Onboard International Space Station
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Published in Frontiers in astronomy and space sciences (30.04.2021)
Published in Frontiers in astronomy and space sciences (30.04.2021)
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Web Resource
Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X‐ray reflectivity data
Svechnikov, Michael, Pariev, Dmitry, Nechay, Andrey, Salashchenko, Nikolay, Chkhalo, Nikolay, Vainer, Yuly, Gaman, Dmitry
Published in Journal of applied crystallography (01.10.2017)
Published in Journal of applied crystallography (01.10.2017)
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Axisymmetric surface shape correction of optical elements by a wide-aperture ion beam
Chernyshev, Aleksei, Chkhalo, Nikolay, Malyshev, Ilya, Mikhailenko, Mikhail, Pestov, Alexey, Salashchenko, Nikolay, Toropov, Mikhail
Published in Applied optics. Optical technology and biomedical optics (20.11.2022)
Published in Applied optics. Optical technology and biomedical optics (20.11.2022)
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Journal Article
Multilayer mirror systems to form hard X-ray beams
Akhsakhalyan, Anton, Akhsakhlyan, Aram, Kharitonov, Alexander, Kluenkov, Eugenie, Murav’ev, Vladimir, Salashchenko, Nikolay
Published in Open Physics (01.06.2005)
Published in Open Physics (01.06.2005)
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Optical constants of sputtered beryllium thin films determined from photoabsorption measurements in the spectral range 20.4–250 eV
Svechnikov, Mikhail, Chkhalo, Nikolay, Lopatin, Alexey, Pleshkov, Roman, Polkovnikov, Vladimir, Salashchenko, Nikolay, Schäfers, Franz, Sertsu, Mewael G., Sokolov, Andrey, Tsybin, Nikolay
Published in Journal of synchrotron radiation (01.01.2020)
Published in Journal of synchrotron radiation (01.01.2020)
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Development of low-energy X-ray fluorescence micro-distribution analysis using a laser plasma X-ray source and multilayer optics
STUIK, R, SHMAENOK, L. A, FLEDDERUS, H, ANDREEV, S. S, SHAMOV, E. A, ZUEV, S. Yu, SALASHCHENKO, N. N, BIJKERK, F
Published in Journal of analytical atomic spectrometry (1999)
Published in Journal of analytical atomic spectrometry (1999)
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Conference Proceeding
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Cr /sc multilayers for the soft-x-ray range
Schäfers, F, Mertins, H C, Schmolla, F, Packe, I, Salashchenko, N N, Shamov, E A
Published in Applied optics (2004) (01.02.1998)
Published in Applied optics (2004) (01.02.1998)
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PELLICLE, RETICLE ASSEMBLY AND LITHOGRAPHIC APPARATUS
LOPATIN, ALEKSEI, SJMAENOK, LEONID, BANINE, VADIM, SALASHCHENKO, NIKOLAY, YAKUNIN, ANDREI, SCACCABAROZZI, LUIGI
Year of Publication 17.10.2013
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Year of Publication 17.10.2013
Patent
MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS
CHKHALO, NIKOLAY, SJMAENOK, LEONID, BANINE, VADIM, GLUSHKOV, DENIS, SALASHCHENKO, NIKOLAY
Year of Publication 16.08.2010
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Year of Publication 16.08.2010
Patent
MULTILAYER SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH SPECTRAL PURITY FILTER, METHOD OF MANUFACTURING DEVICE, AND DEVICE MANUFACTURED THEREBY
BANINE VADIM YEVGENYEVICH, JOHANNES HUBERTUS JOSEPHINA MOORS, SALASHCHENKO NIKOLAY N, SJMAENOK LEONID AIZIKOVITCH
Year of Publication 10.03.2011
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Year of Publication 10.03.2011
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufacturing thereby
MOORS, JOHANNES HUBERTUS, SALASHCHENKO, NIKOLAY NIKOLAEVITCH, SJMAENOK, LEONID AIZIKOVITCH, BANINE, VADIM YEVGENYEVICH
Year of Publication 21.07.2010
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Year of Publication 21.07.2010
Patent