Impact of secondary electron emission noise in SEM
Sakakibara, Makoto, Suzuki, Makoto, Tanimoto, Kenji, Sohda, Yasunari, Bizen, Daisuke, Nakamae, Koji
Published in Microscopy (06.08.2019)
Published in Microscopy (06.08.2019)
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Journal Article
The Temperature Dependence of the Preferential Magnetic Alignment of the Magnetically Stable Axes Observed for Small Oxide Crystals Dispersed in a Fluid Medium
Uyeda, Chiaki, Sakakibara, Makoto, Tanaka, Kenta
Published in Japanese Journal of Applied Physics (01.06.2003)
Published in Japanese Journal of Applied Physics (01.06.2003)
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Journal Article
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR ESTIMATING SAMPLE CHARACTERISTICS
UCHIHO Minami, YACHI Kazufumi, SHIRASAKI Yasuhiro, SAKAKIBARA Makoto, TSUNO Natsuki
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent
Magnetic Alignment at Reduced Field Intensity Due to Decrease of Temperature Observed for Nonferromagnetic Particles Possessing Paramagnetic and Diamagnetic Anisotropy
Uyeda, Chiaki, Tanaka, Kenta, Takashima, Ryouichi, Sakakibara, Makoto
Published in Japanese Journal of Applied Physics (01.03.2004)
Published in Japanese Journal of Applied Physics (01.03.2004)
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Journal Article
반도체 검사 장치 및 반도체 시료의 검사 방법
TAKADA SATOSHI, SHOUJI MINAMI, SAKAKIBARA MAKOTO, SHIRASAKI YASUHIRO, TSUNO NATSUKI
Year of Publication 10.03.2023
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Year of Publication 10.03.2023
Patent
하전 입자선 장치
OOTSUGA KAZUO, KIMIZUKA HEITA, ABE YUSUKE, SAKAKIBARA MAKOTO, YACHI KAZUFUMI
Year of Publication 06.01.2023
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Year of Publication 06.01.2023
Patent
INSPECTION METHOD AND CHARGED PARTICLE BEAM DEVICE
UCHIHO Minami, SHIRASAKI Yasuhiro, SAKAKIBARA Makoto, TSUNO Natsuki, TAKADA Satoshi, MITSUGI Shota
Year of Publication 04.04.2024
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Year of Publication 04.04.2024
Patent