Analysis method of metal contamination for the isopropyl alcohol (IPA)
Dobashi, Kazuya, Saito, Misako
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2016)
Published in 2016 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2016)
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Conference Proceeding
Ultrafine Particle Removal Using Gas Cluster Ion Beam Technology
Dobashi, Kazuya, Inai, Kensuke, Saito, Misako, Seki, Toshio, Aoki, Takaaki, Matsuo, Jiro
Published in IEEE transactions on semiconductor manufacturing (01.08.2013)
Published in IEEE transactions on semiconductor manufacturing (01.08.2013)
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Journal Article
Conference Proceeding
METAL POLLUTION REMOVAL METHOD AND METAL POLLUTION REMOVAL APPARATUS
DOBASHI KAZUYA, SAITO MISAKO, NISHIMURA HIDEKI, KOJIMA SHIGECHIKA, ITO TAKEHIRO
Year of Publication 30.06.2016
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Year of Publication 30.06.2016
Patent
METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING METAL CONTAMINATION
DOBASHI KAZUYA, KOJIMA SHIGEYOSHI, SAITO MISAKO, NISHIMURA HIDEKI, ITO YUDAI
Year of Publication 30.06.2016
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Year of Publication 30.06.2016
Patent