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Year of Publication 01.02.2024
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Year of Publication 01.02.2024
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FILM DEPOSITION DEVICE AND METHOD FOR PRODUCING FILM-COATED WAFER
UEHARA TAKESHI, MIYAMOTO EIJI, KONDO HIDENORI, MATSUDA HIROKAZU, SAITO NAOMICHI
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
FILM DEPOSITION DEVICE AND METHOD FOR PRODUCING FILM-COATED WAFER
UEHARA TAKESHI, MIYAMOTO EIJI, KONDO HIDENORI, MATSUDA HIROKAZU, SAITO NAOMICHI
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
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Local phonon analysis in InGaN film by mapping of Raman peak energy
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HOLDING MEMBER, IRRADIATOR, AND PLASMA APPARATUS
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Year of Publication 06.04.2023
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Year of Publication 29.03.2007
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Year of Publication 29.03.2007
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