A capacitor for integration with copper damascene structure and manufacturing method
HARRIS, EDWARD BELDEN, MERCHANT, SAILESH MANSINH, DOWNEY, STEPHEN WARD
Year of Publication 25.08.2010
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Year of Publication 25.08.2010
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Integrated circuit device having dual damascene capacitor
CHOI, SEUNGMOO, ROY, PRADIP KIMAR, ALERS, GLENN B, MERCHANT, SAILESH MANSINH
Year of Publication 18.04.2012
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Year of Publication 18.04.2012
Patent