칩 디자인 데이터를 사용하여 광학 검사 및 계측 이미지 품질을 개선하기 위한 방법들
CROSS ANDREW, SAH KAUSHIK, JAYARAMAN THIRUPURASUNDARI, SIVARAMAN GANGADHARAN, KANDUKURI SRIKANTH
Year of Publication 23.10.2023
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Year of Publication 23.10.2023
Patent
In-device high resolution and high throughput optical metrology for process development and monitoring
Sah, Kaushik, Li, Shifang, Das, Sayantan, Halder, Sandip, Cross, Andrew
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
웨이퍼 상에서 검출되는 결함에서 주목하는 결함 및 방해물의 식별
VON DEN HOFF MIKE, CROSS ANDREW, MANI ANTONIO, SAH KAUSHIK, PLIHAL MARTIN, DUFFY BRIAN
Year of Publication 09.04.2020
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Year of Publication 09.04.2020
Patent
본딩된 웨이퍼 계측
SAH KAUSHIK, LI SHIFANG, STOERRING MORITZ, KRAH THOMAS, EISENBACH HEIKO
Year of Publication 10.07.2019
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Year of Publication 10.07.2019
Patent
Process window discovery, expansion and control of design hotspots susceptible to overlay failures
Sah, Kaushik, Cross, Andrew, Mani, Antonio, Heuvel, Dieter Van Den, Foubert, Philippe
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding
Process window discovery methodology development for advanced lithography
Van den Heuvel, Dieter, Foubert, Philippe, Baudemprez, Bart, Lee, Angelica, Cross, Andrew, Sah, Kaushik, Haque, Naoshin, Parisi, Paolo, Baris, Oksen
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms
Halder, Sandip, Truffert, Vincent, van den Heuvel, Dieter, Leray, Philippe, Shaunee Cheng, McIntyre, Greg, Sah, Kaushik, Brown, Jim, Parisi, Paolo, Polli, Marco
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding