ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 08.07.2009
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Year of Publication 08.07.2009
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Antireflective composition for a deep ultraviolet photoresist
OBERLANDER, JOSEPH E, DAMMEL, RALPH R, FICNER, STANLEY A, PADMANABAN, MUNIRATHNA, SAGAN, JOHN P
Year of Publication 01.11.2004
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Year of Publication 01.11.2004
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
STANLEY A, FICNER, RALPH R. DAMMEL, JOSEPH E. OBERLANDER, MUNIRATHNA PADMANABAN, JOHN P. SAGAN
Year of Publication 30.04.2004
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Year of Publication 30.04.2004
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 12.09.2001
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Year of Publication 12.09.2001
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 05.10.2000
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Year of Publication 05.10.2000
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Antireflective composition for a deep ultraviolet photoresist
DAMMEL; RALPH R, PADMANABAN; MUNIRATHNA, OBERLANDER; JOSEPH E, SAGAN; JOHN P, FICNER; STANLEY A
Year of Publication 05.09.2000
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Year of Publication 05.09.2000
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
FICNER, STANLEY, A, OBERLANDER, JOSEPH, E, DAMMEL, RALPH, R, SAGAN, JOHN, P, PADMANABAN, MUNIRATHNA
Year of Publication 25.05.2000
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Year of Publication 25.05.2000
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ANTIREFLECTIVE COMPOSITION FOR A DEEP ULTRAVIOLET PHOTORESIST
STANLEY A. FICNER, RALPH R. DAMMEL, JOSEPH E. OBERLANDER, MUNIRATHNA PADMANABAN, JOHN P. SAGAN
Year of Publication 20.09.2002
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Year of Publication 20.09.2002
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