Internal gettering for Ni contamination in Czochralski silicon wafers
SUEOKA, K, SADAMITSU, S, KOIKE, Y, KIHARA, T, KATAHAMA, H
Published in Journal of the Electrochemical Society (01.08.2000)
Published in Journal of the Electrochemical Society (01.08.2000)
Get full text
Journal Article
Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
Sadamitsu, Shinsuke, Umeno, Shigeru, Koike, Yasuo, Hourai, Masataka, Shigeo Sumita, Shigeo Sumita, Tatsuhiko Shigematsu, Tatsuhiko Shigematsu
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.09.1993)
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.09.1993)
Get full text
Journal Article
Axial microscopic distribution of grown-in defects in Czochralski-grown silicon crystals
UMENO, S, SADAMITSU, S, MURAKAMI, H, HOURAI, M, SUMITA, S, SHIGEMATSU, T
Published in Japanese Journal of Applied Physics (01.05.1993)
Published in Japanese Journal of Applied Physics (01.05.1993)
Get full text
Journal Article
Degradation of gate oxide integrity by metal impurities
HIRAMOTO, K, SANO, M, SADAMITSU, S, FUJINO, N
Published in Japanese Journal of Applied Physics (01.12.1989)
Published in Japanese Journal of Applied Physics (01.12.1989)
Get full text
Journal Article
A model for the formation of oxidation-induced stacking faults in Czochralski silicon
SADAMITSU, S, OKUI, M, SUEOKA, K, MARSDEN, K, SHIGEMATSU, T
Published in Japanese Journal of Applied Physics (1995)
Published in Japanese Journal of Applied Physics (1995)
Get full text
Journal Article
Transmission electron microscopy observation of defects induced by Fe contamination on Si(100) surface
SADAMITSU, S, SASAKI, A, HOURAI, M, SUMITA, S, FUJINO, N
Published in Japanese Journal of Applied Physics (01.08.1991)
Published in Japanese Journal of Applied Physics (01.08.1991)
Get full text
Journal Article
Analysis of grown-in defects in CZSi crystals using TEM
Sadamitsu, Shinsuke, Umeno, Shigeru, Yanase, Yoshio, Ono, Toshiaki, Hourai, Masataka
Published in Denshi kenbikyo (30.11.1999)
Published in Denshi kenbikyo (30.11.1999)
Get full text
Journal Article
TEM observation of defects induced by Cu contamination on Si(100) surface
SADAMITSU, S, SUMITA, S, FUJINO, N, SHIRAIWA, T
Published in Japanese Journal of Applied Physics (01.10.1988)
Published in Japanese Journal of Applied Physics (01.10.1988)
Get full text
Journal Article
Dependence of Gettering Efficiency on Metal Impurities
Miyazaki, Morimasa, Sano, Masakazu, Sadamitsu, Shinsuke, Sumita, Shigeo, Fujino, Nobukatsu, Shiraiwa, Toshio
Published in Japanese Journal of Applied Physics (01.04.1989)
Published in Japanese Journal of Applied Physics (01.04.1989)
Get full text
Journal Article
HIGH-RESISTANCE SILICON WAFER AND PROCESS FOR PRODUCING THE SAME
TAKAO, HIROYUKI, SUEOKA, KOJI, TAKASE, NOBUMITSU, HORAI, MASATAKA, SADAMITSU, SHINSUKE
Year of Publication 22.01.2004
Get full text
Year of Publication 22.01.2004
Patent
HIGH RESISTANCE SILICON WAFER AND METHOD FOR PRODUCTION THEREOF
TAKASE, NOBUMITSU, SUEOKA, KOUJI, NISHIKAWA, HIDESHI, ITO, MAKOTO, SADAMITSU, SHINSUKE
Year of Publication 06.11.2003
Get full text
Year of Publication 06.11.2003
Patent
PROCESS FOR PRODUCING SILICON WAFER
Sadamitsu, Shinsuke, Sugimura, Wataru, Hourai, Masataka, Akatsuka, Masanori
Year of Publication 07.08.2019
Get full text
Year of Publication 07.08.2019
Patent