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METHOD FOR MANUFACTURING SEMICONDUCTOR SILICON EPITAXIAL WAFER AND SEMICONDUCTOR DEVICE

by NAGASHIMA, TOORU, NINOMIYA, MASAHARU, SADAMITSU, SHINSUKE, KII, TAKESHI, KOIKE, YASUO
Year of Publication 11.06.1998

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High resistivity silicon wafers

by Sadamitsu, Shinsuke, Hourai, Masataka
Year of Publication 28.08.2012

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High resistivity silicon wafers

by SADAMITSU SHINSUKE, HOURAI MASATAKA
Year of Publication 28.08.2012

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SILICON EPITAXIAL WAFER AND PRODUCTION METHOD FOR SAME

by SADAMITSU SHINSUKE, HOURAI MASATAKA
Year of Publication 14.07.2011

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A METHOD OF MANUFACTURING A HIGH-RESISTANCE SILICON WAFER

by TAKAO, HIROYUKI, TAKASE, NOBUMITSU, SUEOKA, KOUJI, HORAI, MASATAKA, SADAMITSU, SHINSUKE
Year of Publication 05.10.2016

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SILICON INSULATOR SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

by SADAMITSU SHINSUKE
Year of Publication 15.01.2004

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Silicon epitaxial wafer and production method for same

by SADAMITSU SHINSUKE, HOURAI MASATAKA
Year of Publication 15.01.2009

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SILICON EPITAXIAL WAFER AND METHOD FOR MANUFACTURING THE SAME

by HOURAI, MASATAKA, SADAMITSU, SHINSUKE
Year of Publication 24.09.2008

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SILICON EPITAXIAL WAFER AND METHOD FOR MANUFACTURING THE SAME

by HOURAI, MASATAKA, SADAMITSU, SHINSUKE
Year of Publication 27.06.2007

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SILICON EPITAXIAL WAFER AND METHOD FOR MANUFACTURING THE SAME

by SADAMITSU SHINSUKE, HOURAI MASATAKA
Year of Publication 03.04.2007

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Silicon epitaxial wafer and manufacturing method for same

by HOURAI, MASATAKA, SADAMITSU, SHINSUKE
Year of Publication 01.04.2007

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MANUFACTURING METHOD OF SOI SUBSTRATE

by SADAMITSU SHINSUKE, NAKAMAE MASAHIKO
Year of Publication 02.11.2006

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SILICON EPITAXIAL WAFER AND ITS MANUFACTURING METHOD

by SADAMITSU SHINSUKE, HORAI MASATAKA
Year of Publication 16.03.2006

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PROCESS FOR PRODUCING HIGH RESISTIVITY SILICON WAFER, AND PROCESS FOR PRODUCING EPITAXIAL WAFER AND SOI WAFER

by TAKAO, HIROYUKI, HORAI, MASATAKA, KURITA, KAZUNARI, SADAMITSU, SHINSUKE
Year of Publication 06.11.2013

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SIMOX SUBSTRATE AND ITS MANUFACTURING METHOD

by SADAMITSU SHINSUKE, AOKI YOSHIRO
Year of Publication 30.06.2005

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HIGH-RESISTANCE SILICON WAFER

by SADAMITSU SHINSUKE, HORAI MASATAKA
Year of Publication 09.06.2005

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High resistivity silicon wafers

by SADAMITSU SHINSUKE, HOURAI MASATAKA
Year of Publication 19.05.2005

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MANUFACTURE OF SILICON WAFER

by SADAMITSU SHINSUKE
Year of Publication 18.10.1996

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HIGH RESISTANCE SILICON WAFER AND METHOD FOR PRODUCTION THEREOF

by TAKASE, NOBUMITSU, SUEOKA, KOUJI, NISHIKAWA, HIDESHI, ITO, MAKOTO, SADAMITSU, SHINSUKE
Year of Publication 03.04.2013

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SILICON WAFER AND MANUFACTURING METHOD THEREFOR

by ENDO AKIHIKO, SADAMITSU SHINSUKE
Year of Publication 24.02.2005

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