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Year of Publication 03.04.2019
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APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
SINGH SARAVJEET, SCOTT GRAEME JAMIESON, SABHARWAL AMITABH, KUMAR AJAY
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Published in Integrated ferroelectrics (01.01.2003)
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APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
SCOTT, GRAEME JAMIESON, SABHARWAL, AMITABH, KUMAR, AJAY, SINGH, SARAVJEET
Year of Publication 24.01.2013
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Year of Publication 24.01.2013
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APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
SINGH SARAVJEET, SCOTT GRAEME JAMIESON, SABHARWAL AMITABH, KUMAR AJAY
Year of Publication 06.12.2012
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Year of Publication 06.12.2012
Patent
APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION
SCOTT, GRAEME JAMIESON, SABHARWAL, AMITABH, KUMAR, AJAY, SINGH, SARAVJEET
Year of Publication 06.12.2012
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Year of Publication 06.12.2012
Patent