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OUYE ALAN HIROSHI, BIVENS DARIN, PANAYIL SHEEBA J, SABHARWAL AMITABH, KUMAR AJAY, LEWINGTON RICHARD, CHANDRACHOOD MADHAVI R
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Year of Publication 01.05.2008
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Year of Publication 01.10.2013
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Year of Publication 01.09.2013
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Year of Publication 01.09.2013
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INDUCTIVELY COUPLED PLASMA REACTOR HAVING RF PHASE CONTROL AND METHODS OF USE THEREOF
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Year of Publication 04.11.2010
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Year of Publication 04.11.2010
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Method And Apparatus For Photomask Plasma Etching
BIVENS DARIN, PANAYIL SHEEBA J, SABHARWAL AMITABH, KUMAR AJAY, OUYE ALAN HIROSH, LEWINGTON RICHARD, CHANDRACHOOD MADHAVI R
Year of Publication 10.09.2014
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Year of Publication 10.09.2014
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Method for etching EUV reflective multi-material layers utilized to form a photomask
GRIMBERGEN, MICHAEL, SABHARWAL, AMITABH, CHANDRACHOOD, MADHAVI, KUMAR, AJAY, YU, KEVEN KAISHENG
Year of Publication 01.07.2013
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Year of Publication 01.07.2013
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Method and apparatus for fabricating plasma reactor parts
SABHARWAL, AMITABH, YUAN, JIE, BIVENS, DARIN, LEWINGTON, RICHARD, SUN, JEFFIFER, RYABOVA, ELMIRA, CHANDRACHOOD, MADHAVI R
Year of Publication 01.06.2013
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Year of Publication 01.06.2013
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Method and device for preparing plasma reaction parts
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Year of Publication 25.07.2012
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Year of Publication 25.07.2012
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Method and apparatus for photomask plasma etching
SABHARWAL, AMITABH, OUYE, ALAN HIROSHI, BIVENS, DARIN, KUMAR, AJAY, LEWINGTON, RICHARD, PANAYIL, SHEEBA J, CHANDRACHOOD, MADHAVI R
Year of Publication 01.09.2013
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Year of Publication 01.09.2013
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Method and apparatus for photomask plasma etching
SABHARWAL, AMITABH, OUYE, ALAN HIROSHI, BIVENS, DARIN, KUMAR, AJAY, LEWINGTON, RICHARD, PANAYIL, SHEEBA J, CHANDRACHOOD, MADHAVI R
Year of Publication 11.02.2013
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Year of Publication 11.02.2013
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Method and apparatus for fabricating plasma reactor parts
SABHARWAL, AMITABH, YUAN, JIE, BIVENS, DARIN, LEWINGTON, RICHARD, SUN, JEFFIFER, RYABOVA, ELMIRA, CHANDRACHOOD, MADHAVI R
Year of Publication 16.07.2008
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Year of Publication 16.07.2008
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Method and apparatus for photomask plasma etching
OUYE ALAN HIROSHI, BIVENS DARIN, SABHARWAL AMITABH, KUMAR AJAY, LEWINGTON RICHARD
Year of Publication 07.05.2008
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Year of Publication 07.05.2008
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Method and apparatus for photomask plasma etching
OUYE ALAN HIROSHI, BIVENS DARIN, SABHARWAL AMITABH, KUMAR AJAY, LEWINGTON RICHARD
Year of Publication 07.05.2008
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Year of Publication 07.05.2008
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Method for preparing yttria parts and plasma reactor parts comprising yttria
YUAN JIE, BIVENS DARIN, SUN JENNIFER, SABHARWAL AMITABH, RYABOVA ELMIRA, LEWINGTON RICHARD
Year of Publication 07.05.2008
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Year of Publication 07.05.2008
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Mask etch process
GRIMBERGEN, MICHAEL, SABHARWAL, AMITABH, LEUNG, TOI YUE BECKY, CHANDRACHOOD, MADHAVI R
Year of Publication 01.05.2008
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Year of Publication 01.05.2008
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Method and apparatus for photomask plasma etching
SABHARWAL, AMITABH, OUYE, ALAN HIROSHI, BIVENS, DARIN, KUMAR, AJAY, LEWINGTON, RICHARD, PANAYIL, SHEEBA J, CHANDRACHOOD, MADHAVI R
Year of Publication 16.05.2008
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Year of Publication 16.05.2008
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Method and apparatus for photomask plasma etching
SABHARWAL, AMITABH, OUYE, ALAN HIROSHI, BIVENS, DARIN, KUMAR, AJAY, LEWINGTON, RICHARD, PANAYIL, SHEEBA J, CHANDRACHOOD, MADHAVI R
Year of Publication 16.05.2008
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Year of Publication 16.05.2008
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