Reduction of Copper Oxide Film to Elemental Copper
Soininen, P. J., Elers, K.-E., Saanila, V., Kaipio, S., Sajavaara, T., Haukka, S.
Published in Journal of the Electrochemical Society (2005)
Published in Journal of the Electrochemical Society (2005)
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Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates
ELERS, K.-E, SAANILA, V, LI, W.-M, SOININEN, P. J, KOSTAMO, J. T, HAUKKA, S, JUHANOJA, J, BESTING, W. F. A
Published in Thin solid films (23.06.2003)
Published in Thin solid films (23.06.2003)
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Diffusion Barrier Deposition on a Copper Surface by Atomic Layer Deposition
Elers, K.-E., Saanila, V., Soininen, P. J., Li, W.-M., Kostamo, J. T., Haukka, S., Juhanoja, J., Besling, W. F. A.
Published in Chemical vapor deposition (04.07.2002)
Published in Chemical vapor deposition (04.07.2002)
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Atomic layer deposition of W xN/TiN and WN xC y/TiN nanolaminates
Elers, K.-E., Saanila, V., Li, W.-M., Soininen, P.J., Kostamo, J.T., Haukka, S., Juhanoja, J., Besling, W.F.A.
Published in Thin solid films (2003)
Published in Thin solid films (2003)
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[Ca(Thd)2(Tetraen)]: A Monomeric Precursor for Deposition of CaS Thin Films
Hänninen, Timo, Mutikainen, Ilpo, Saanila, Ville, Ritala, Mikko, Leskelä, Markku, Hanson, Jonathan C
Published in Chemistry of materials (15.05.1997)
Published in Chemistry of materials (15.05.1997)
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Atomic Layer Epitaxy Growth of BaS and BaS:Ce Thin Films from In Situ Synthesized Ba(thd)2
Saanila, Ville, Ihanus, Jarkko, Ritala, Mikko, Leskelä, Markku
Published in Chemical vapor deposition (01.12.1998)
Published in Chemical vapor deposition (01.12.1998)
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