Mechanical impulse enhancement in MEMS using porous silicon combustion process
A. V. Dolbik, A. Yu. Zubov, S. N. Krisevich, A. S. Sychevich, A. V. Korotkevich, S. K. Lazarouk, V. A. Labunov
Published in Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (01.06.2019)
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Published in Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (01.06.2019)
Journal Article