Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O 3 as the oxygen source
Sønsteby, Henrik H, Killi, Veronica A-L K, Rykkje, Linn M, Bickford, Justin R, Martin, Eric G, Hoffman, Robert C, Nilsen, Ola
Published in Dalton transactions : an international journal of inorganic chemistry (17.01.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (17.01.2022)
Get full text
Journal Article
Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source
Sønsteby, Henrik H, Killi, Veronica A-L K, Rykkje, Linn M, Bickford, Justin R, Martin, Eric G, Hoffman, Robert C, Nilsen, Ola
Published in Dalton transactions : an international journal of inorganic chemistry (01.01.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (01.01.2022)
Get full text
Journal Article