Silicon nitride grating coupler, preparation method thereof and optical device
LI ZHIHUA, ZHANG PENG, LI DONGHAO, TANG BO, XIE LING, LIU RUONAN, YANG YAN, LI BIN
Year of Publication 13.05.2022
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Year of Publication 13.05.2022
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PACKAGING METHOD FOR SEMICONDUCTOR STRUCTURE, PACKAGING STRUCTURE, AND CHIP
XIE, Ling, YANG, Yan, SUN, Fujun, ZHANG, Peng, TANG, Bo, WANG, Wenwu, LIU, Ruonan, LI, Bin, LI, Zhihua, HUANG, Kai
Year of Publication 07.04.2022
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Year of Publication 07.04.2022
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Growth method of silicon nitride film and preparation method of thick-film silicon nitride waveguide device
LI ZHIHUA, ZHANG PENG, TANG BO, XIE LING, LIU RUONAN, YANG YAN, LI BIN
Year of Publication 20.04.2021
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Year of Publication 20.04.2021
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