by Fu, C, Rummler, Z, Schomburg, W
Published in Journal of micromechanics and microengineering (01.07.2003)

by Rogge, T., Rummler, Z., Schomburg, W.K.
Published in Sensors and actuators. A. Physical. (01.02.2004)

by Truckenmüller, R, Rummler, Z, Schaller, Th, Schomburg, W K
Published in Journal of micromechanics and microengineering (01.07.2002)

by Schomburg, W K, Rummler, Z, Shao, P, Wulff, K, Xie, L
Published in Journal of micromechanics and microengineering (01.07.2004)

by Shao, P, Rummler, Z, Schomburg, W K
Published in Journal of micromechanics and microengineering (01.07.2003)

by RUMMLER, Z, BACHER, W, SAILE, V, SCHOMBURG, W. K
Published in Microsystem technologies : sensors, actuators, systems integration (2000)

by Shao, Peige, Rummler, Zeno, Schomburg, Werner Karl
Published in Journal of micromechanics and microengineering (01.02.2004)

by Truckenmueller, R, Rummler, Z, Schaller, Th
Published in Journal of micromechanics and microengineering (01.07.2002)