Advances in piezoelectric PZT-based RF MEMS components and systems
Benoit, R R, Rudy, R Q, Pulskamp, J S, Polcawich, R G, Bedair, S S
Published in Journal of micromechanics and microengineering (01.08.2017)
Published in Journal of micromechanics and microengineering (01.08.2017)
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Journal Article
Characterization of a piezoelectric MEMS actuator surface toward motion-enabled reconfigurable RF circuits
Tellers, M C, Pulskamp, J S, Bedair, S S, Rudy, R Q, Kierzewski, I M, Polcawich, R G, Bergbreiter, S E
Published in Journal of micromechanics and microengineering (01.03.2018)
Published in Journal of micromechanics and microengineering (01.03.2018)
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Journal Article
Thin-film piezoelectric transformers operating in harmonics of out-of-plane flexure modes
Bedair, S. S., Pulskamp, J. S., Polcawich, R. G., Rudy, R. Q., Puder, J.
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
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Conference Proceeding
PZT-Based Piezoelectric MEMS Technology
Smith, Gabriel L., Pulskamp, Jeffrey S., Sanchez, Luz M., Potrepka, Daniel M., Proie, Robert M., Ivanov, Tony G., Rudy, Ryan Q., Nothwang, William D., Bedair, Sarah S., Meyer, Christopher D., Polcawich, Ronald G.
Published in Journal of the American Ceramic Society (01.06.2012)
Published in Journal of the American Ceramic Society (01.06.2012)
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Journal Article
Higher dimensional flexure mode for enhanced effective electromechanical coupling in PZT-on-silicon MEMS resonators
Puder, J. M., Bedair, S. S., Pulskamp, J. S., Rudy, R. Q., Polcawich, R. G., Bhave, S. A.
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
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Conference Proceeding
Accelerated lifetime and reliability testing of large-deflection piezoelectric microsystems
Rudy, R. Q., Sanchez, L. M., Tellers, M., Polcawich, R. G.
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
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Conference Proceeding
Integrated thin-film piezoelectric traveling wave ultrasonic motors
Smith, G. L., Rudy, R. Q., DeVoe, D. L., Polcawich, R. G.
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
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Conference Proceeding
Thin-film piezoelectric traveling wave ultrasonic rotary motor
Rudy, R. Q., DeVoe, D. L., Smith, G. L., Polcawich, R. G.
Published in 2012 Microsystems for Measurement and Instrumentation (MAMNA) (01.03.2012)
Published in 2012 Microsystems for Measurement and Instrumentation (MAMNA) (01.03.2012)
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Conference Proceeding