On the FinFET extension implant energy
Gossmann, H.-J.L., Agarwal, A., Parrill, T., Rubin, L.M., Poate, J.M.
Published in IEEE transactions on nanotechnology (01.12.2003)
Published in IEEE transactions on nanotechnology (01.12.2003)
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Journal Article
Conference Proceeding
Molecular Implants for Advanced Devices
Rubin, L.M., Ameen, M.S., Harris, M.A., Chuong Huynh
Published in 2007 International Workshop on Junction Technology (01.06.2007)
Published in 2007 International Workshop on Junction Technology (01.06.2007)
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Conference Proceeding
Investigation of wafer temperature effect during implant for PMOS transistor fabrication
Tae-Hoon Huh, Byung-Jae Kang, Geum-Joo Ra, Shin-Woo Kang, Kim, S., Reece, R., Rubin, L.M., Min-Sung Lee, Jong-Oh Lee, Dong-Chul Park
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
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Conference Proceeding
High dose p+ buried layers for reduced diode leakage
Rubin, L.M., Lee, K.H., Oh, J.G., Lee, J.Y., Lee, S.K.
Published in 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) (1999)
Published in 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) (1999)
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Conference Proceeding
Epi-replacement in CMOS technology by high dose, high energy boron implantation into Cz substrates
Bourdelle, K.K., Chen, Y., Ashton, R.A., Rubin, L.M., Agarwal, A., Morris, W.
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
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Conference Proceeding