Plasmonics with Doped Quantum Dots
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Published in Israel journal of chemistry (01.12.2012)
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Progress report on high aspect ratio patterning for memory devices
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Published in Japanese Journal of Applied Physics (01.07.2023)
Published in Japanese Journal of Applied Physics (01.07.2023)
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Year of Publication 08.11.2022
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Year of Publication 08.11.2022
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Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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칼코겐화물들 (CHALCOGENIDES) 을 프로세싱하기 위한 기법들 및 장치들
HOANG JOHN, ROUTZAHN AARON LYNN, LILL THORSTEN BERND, FISCHER ANDREAS, SHEN MEIHUA, VARADARAJAN SESHASAYEE
Year of Publication 29.04.2024
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Year of Publication 29.04.2024
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3-단자 수직 메모리 구조체의 채널 층 보호
HOANG JOHN, WU HUI JUNG, ROUTZAHN AARON LYNN, LILL THORSTEN, SHEN MEIHUA, ROBERTS FRANCIS SLOAN
Year of Publication 01.11.2022
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Year of Publication 01.11.2022
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고 종횡비 패터닝 및 수직 스케일링을 위한 막 스택 단순화
HOANG JOHN, MUSSELWHITE NATHAN, WU HUI JUNG, SHANKAR NAGRAJ, YANG JIALING, ROUTZAHN AARON LYNN, ALTIERI NICHOLAS DOMINIC, BANERJI ANANDA K, SHEN MEIHUA, UGLOW JAY E, KAMARTHY GOWRI CHANNA, CHI HAO, KAWAGUCHI MARK NAOSHI, LILL THORSTEN BERND, GUNAWAN GERENG, MCLAUGHLIN KEVIN M, VAN SCHRAVENDIJK BART J
Year of Publication 22.04.2021
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Year of Publication 22.04.2021
Patent
Thermal Isotropic Atomic Layer Etching of Metallic Molybdenum
Fischer, Andreas, Routzahn, Aaron, Lill, Thorsten
Published in Meeting abstracts (Electrochemical Society) (23.11.2020)
Published in Meeting abstracts (Electrochemical Society) (23.11.2020)
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Journal Article
Isotropic Atomic Layer Etching in High Aspect Ratio Structures
Fischer, Andreas, Lemaire, Paul, Routzahn, Aaron, Lill, Thorsten
Published in Meeting abstracts (Electrochemical Society) (30.05.2021)
Published in Meeting abstracts (Electrochemical Society) (30.05.2021)
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