Application of a Test Structure for Minimising Seed Layer Thickness of Electroplated Ferromagnetic Films
Ross, Alan W.S., Dover, Coinneach M., Smith, Stewart, Terry, Jonathan G., Mount, Andrew R., Walton, Anthony J.
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
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Conference Proceeding
On-mask CD and overlay test structures for alternating aperture phase shift lithography
Smith, S., McCallum, M., Walton, A.J., Stevenson, J.T.M., Harris, P.D., Ross, A.W.S., Hourd, A.C., Liudi Jiang
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
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Journal Article
Conference Proceeding
Electrical characterization of platinum deposited by focused ion beam
Smith, S., Walton, A.J., Bond, S., Ross, A.W.S., Stevenson, J.T.M., Gundlach, A.M.
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
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Journal Article
Conference Proceeding
Evaluation of sheet resistance and electrical linewidth measurement techniques for copper damascene interconnect
Smith, S., Walton, A.J., Ross, A.W.S., Bodammer, G.K.H., Stevenson, J.T.M.
Published in IEEE transactions on semiconductor manufacturing (01.05.2002)
Published in IEEE transactions on semiconductor manufacturing (01.05.2002)
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Journal Article
Conference Proceeding