On-mask CD and overlay test structures for alternating aperture phase shift lithography
Smith, S., McCallum, M., Walton, A.J., Stevenson, J.T.M., Harris, P.D., Ross, A.W.S., Hourd, A.C., Liudi Jiang
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
Published in IEEE transactions on semiconductor manufacturing (01.05.2005)
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Conference Proceeding
Evaluation of sheet resistance and electrical linewidth measurement techniques for copper damascene interconnect
Smith, S., Walton, A.J., Ross, A.W.S., Bodammer, G.K.H., Stevenson, J.T.M.
Published in IEEE transactions on semiconductor manufacturing (01.05.2002)
Published in IEEE transactions on semiconductor manufacturing (01.05.2002)
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Electrical characterization of platinum deposited by focused ion beam
Smith, S., Walton, A.J., Bond, S., Ross, A.W.S., Stevenson, J.T.M., Gundlach, A.M.
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
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Journal Article
Conference Proceeding
Improved test structures for the electrical measurement of feature size on an alternating aperture phase-shifting mask
Smith, S., Walton, A.J., McCallum, M., Hourd, A.C., Stevenson, J.T.M., Ross, A.W.S.
Published in Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005 (2005)
Published in Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005 (2005)
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Conference Proceeding
Suspended Greek cross test structures for measuring the sheet resistance of non-standard cleanroom materials
Enderling, S., Brown, C.L., Smith, S., Dicks, M.H., Stevenson, J.T.M., Ross, A.W.S., Mitkova, M., Kozicki, M.N., Walton, A.J.
Published in Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005 (2005)
Published in Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005 (2005)
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Conference Proceeding
Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test Structures Fabricated from Silicon Preforms
Shulver, B.J.R., Bunting, A.S., Gundlach, A.M., Haworth, L.I., Ross, A.W.S., Smith, S., Snell, A.J., Stevenson, J.T.M., Walton, A.J., Allen, R.A., Cresswell, M.W.
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
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Conference Proceeding
Array Based Test Structure for Optical-Electrical Overlay Calibration
Shulver, B.J.R., Allen, R.A., Walton, A.J., Cresswell, M.W., Stevenson, J.T.M., Smith, S., Bunting, A.S., Dunare, C., Gundlach, A.M., Haworth, L.I., Ross, A.W.S., Snell, A.J.
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
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Conference Proceeding
Design and fabrication of a copper test structure for use as an electrical critical dimension reference
Shulver, B.J.R., Bunting, A.S., Gundlach, A.M., Haworth, L.I., Ross, A.W.S., Snell, A.J., Stevenson, J.T.M., Walton, A.J., Allen, R.A., Cresswell, M.W.
Published in 2006 IEEE International Conference on Microelectronic Test Structures (2006)
Published in 2006 IEEE International Conference on Microelectronic Test Structures (2006)
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Conference Proceeding
Fabrication of 200nm field effect transistors by X-ray lithography using a laser-plasma X-ray source
Reeves, C.M., Turcu, I.C.E., Stevenson, J.T.M., Ross, A.W.S., Gundlach, A.M., Prewett, P., Lawes, R.A., Anastasi, P., Burge, R., Michell, P.
Published in Microelectronic engineering (01.01.1996)
Published in Microelectronic engineering (01.01.1996)
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Building EWOD microfluidic array technology on top of foundry CMOS
Li, Y, Li, P, Kazantzis, A, Haworth, L.I, Muir, K, Ross, A.W.S, Terry, J.G, Stevenson, J.T.M, Gundlach, A.M, Bunting, A, Walton, A.J
Published in IET Seminar on MEMS Sensors and Actuators (2006)
Published in IET Seminar on MEMS Sensors and Actuators (2006)
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Conference Proceeding
Evaluation of the issues involved with test structures for the measurement of sheet resistance and linewidth of copper damascene interconnect
Smith, S., Walton, A.J., Ross, A.W.S., Bodammer, G.K.H., Stevenson, J.T.M.
Published in ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) (2001)
Published in ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) (2001)
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Conference Proceeding
Test structures for CD and overlay metrology on alternating aperture phase-shifting masks
Smith, S., McCallum, M., Walton, A.J., Stevenson, J.T.M., Harris, P.D., Ross, A.W.S., Hourd, A.C., Jiang, L.
Published in Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516) (2004)
Published in Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516) (2004)
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Conference Proceeding
Test structures for the electrical characterisation of platinum deposited by focused ion beam
Smith, S., Walton, A.J., Bond, S., Ross, A.W.S., Stevenson, J.T.M., Gundlach, A.M.
Published in Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002 (2002)
Published in Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002 (2002)
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Conference Proceeding