Method for in-die overlay control using FEOL dummy fill layer
Schmidt, Martin, Thierbach, Stefan, Schuring, Andreas, Moll, Peter, Hartig, Carsten, Fischer, Daniel, Ruhm, Matthias, Überreiter, Guido, Rongen, Stefan
Year of Publication 30.10.2018
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Year of Publication 30.10.2018
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METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER
SCHURING Andreas, SCHMIDT Martin, THIERBACH Stefan, RONGEN Stefan, RUHM Matthias, MOLL Peter, FISCHER Daniel, HARTIG Carsten, ÜBERREITER Guido
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
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Method for in-die overlay control using feol dummy fill layer
RUHM, MATTHIAS, THIERBACH, STEFAN, HARTIG, CARSTEN, UEBERREITER, GUIDO, SCHURING, ANDREAS, FISCHER, DANIEL, MOLL, PETER, RONGEN, STEFAN, SCHMIDT, MARTIN
Year of Publication 01.07.2019
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Year of Publication 01.07.2019
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Method for in-die overlay control using FEOL dummy fill layer
RUHM, MATTHIAS, THIERBACH, STEFAN, HARTIG, CARSTEN, UEBERREITER, GUIDO, SCHURING, ANDREAS, FISCHER, DANIEL, MOLL, PETER, RONGEN, STEFAN, SCHMIDT, MARTIN
Year of Publication 16.02.2018
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Year of Publication 16.02.2018
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Method For In-die Overlay Control Using Feol Dummy Fill Layer
MARTIN SCHMIDT, STEFAN RONGEN, STEFAN THIERBACH, PETER MOLL, CARSTEN HARTIG, ANDREAS SCHURING, DANIEL FISCHER, GUIDO UBERREITER, MATTHIAS RUHM
Year of Publication 08.12.2017
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Year of Publication 08.12.2017
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Method of etching a layer in a trench and method of fabricating a trench capacitor
SCHREMS MARTIN, KOEHLER DANIEL, RONGEN STEFAN, LUETZEN JOERN, SCHMIDT BARBARA
Year of Publication 06.09.2005
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Year of Publication 06.09.2005
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Method of etching a layer in a trench and method of fabricating a trench capacitor
Lützen, Jörn, Schmidt, Barbara, Rongen, Stefan, Schrems, Martin, Köhler, Daniel
Year of Publication 06.09.2005
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Year of Publication 06.09.2005
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Method for etching a layer in a trench and method for fabricating a trench capacitor
SCHMIDT, BARBARA, KOEHLER, DANIEL, SCHREMS, MARTIN, LUETZEN, JOERN, RONGEN, STEFAN
Year of Publication 01.11.2003
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Year of Publication 01.11.2003
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Method of etching a layer in a trench and method of fabricating a trench capacitor
SCHREMS MARTIN, KOHLER DANIEL, RONGEN STEFAN, LUTZEN JORN, SCHMIDT BARBARA
Year of Publication 03.04.2003
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Year of Publication 03.04.2003
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Method of etching a layer in a trench and method of fabricating a trench capacitor
Schmidt, Barbara, Lutzen, Jorn, Rongen, Stefan, Schrems, Martin, Kohler, Daniel
Year of Publication 03.04.2003
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Year of Publication 03.04.2003
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Semiconductor memory cell and method for fabricating the memory cell
GUSTIN WOLFGANG, SCHREMS MARTIN, GRUENING-VON SCHWERIN ULRIKE, RONGEN STEFAN, TEMMLER DIETMAR, STRASSER RUDOLF
Year of Publication 07.12.2004
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Year of Publication 07.12.2004
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Semiconductor memory cell and method for fabricating the memory cell
Gustin, Wolfgang, Grüning-Von Schwerin, Ulrike, Temmler, Dietmar, Schrems, Martin, Rongen, Stefan, Strasser, Rudolf
Year of Publication 07.12.2004
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Year of Publication 07.12.2004
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Semiconductor memory cell and method for fabricating the memory cell
Von Schwerin, Ulrike Gruning, Gustin, Wolfgang, Temmler, Dietmar, Schrems, Martin, Rongen, Stefan, Strasser, Rudolf
Year of Publication 12.08.2004
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Year of Publication 12.08.2004
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Semiconductor memory cell and method for fabricating the memory cell
GUSTIN WOLFGANG, SCHREMS MARTIN, RONGEN STEFAN, VON SCHWERIN ULRIKE GRUNING, TEMMLER DIETMAR, STRASSER RUDOLF
Year of Publication 12.08.2004
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Year of Publication 12.08.2004
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SEMICONDUCTOR MEMORY LOCATION AND METHOD FOR THE PRODUCTION THEREOF
GRUENING VON SCHWERIN, ULRIKE, GUSTIN, WOLFGANG, STRASSER, RUDOLF, TEMMLER, DIETMAR, SCHREMS, MARTIN, RONGEN, STEFAN
Year of Publication 03.12.2003
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Year of Publication 03.12.2003
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Semiconductor memory cell and method for fabricating it
GRUENING VON SCHWERIN, ULRIKE, GUSTIN, WOLFGANG, TEMMLER, DIETMAR, SCHREMS, MARTIN, RONGEN, STEFAN
Year of Publication 21.09.2003
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Year of Publication 21.09.2003
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SEMICONDUCTOR MEMORY LOCATION AND METHOD FOR THE PRODUCTION THEREOF
GRUENING VON SCHWERIN, ULRIKE, GUSTIN, WOLFGANG, STRASSER, RUDOLF, TEMMLER, DIETMAR, SCHREMS, MARTIN, RONGEN, STEFAN
Year of Publication 19.09.2002
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Year of Publication 19.09.2002
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