Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables
Roh, Hyun-Joon, Ryu, Sangwon, Jang, Yunchang, Kim, Nam-Kyun, Jin, Younggil, Park, Seolhye, Kim, Gon-Ho
Published in IEEE transactions on semiconductor manufacturing (01.05.2018)
Published in IEEE transactions on semiconductor manufacturing (01.05.2018)
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Journal Article
Plasma information-based virtual metrology (PI-VM) and mass production process control
Park, Seolhye, Seong, Jaegu, Jang, Yunchang, Roh, Hyun-Joon, Kwon, Ji-Won, Lee, Jinyoung, Ryu, Sangwon, Song, Jaemin, Roh, Ki-Baek, Noh, Yeongil, Park, Yoona, Jang, Yongsuk, Cho, Taeyoung, Yang, Jae-Ho, Kim, Gon-Ho
Published in Journal of the Korean Physical Society (01.04.2022)
Published in Journal of the Korean Physical Society (01.04.2022)
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Journal Article
Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters
Park, Seolhye, Jeong, Sangmin, Jang, Yunchang, Ryu, Sangwon, Roh, Hyun-Joon, Kim, Gon-Ho
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
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Journal Article
Prediction complexity-based HEVC parallel processing for asymmetric multicores
Roh, Hyun-Joon, Han, Sung Won, Ryu, Eun-Seok
Published in Multimedia tools and applications (01.12.2017)
Published in Multimedia tools and applications (01.12.2017)
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Journal Article
Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method
Huh, Sung-Ryul, Kim, Nam-Kyun, Roh, Hyun-Joon, Choi, Myung-Sun, Lee, Seok-Hwan, Kim, Gon-Ho
Published in Journal of physics. D, Applied physics (21.01.2015)
Published in Journal of physics. D, Applied physics (21.01.2015)
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Journal Article
Observation of oversaturation-induced defect formation in tungsten irradiated by low energy deuterium ion
Jin, Younggil, Song, Jae-Min, Roh, Ki-Baek, Kim, Nam-Kyun, Roh, Hyun-Joon, Jang, Yunchang, Ryu, Sangwon, Bae, Byeongjun, Kim, Gon-Ho
Published in Journal of the Korean Physical Society (01.08.2016)
Published in Journal of the Korean Physical Society (01.08.2016)
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Journal Article
Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control
Koo, Junmo, Ha, Daegeun, Park, Damdae, Roh, Hyun-Joon, Ryu, Sangwon, Kim, Gon-Ho, Baek, Kye Hyun, Han, Chonghun
Published in Computers & chemical engineering (08.05.2017)
Published in Computers & chemical engineering (08.05.2017)
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Journal Article
Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth
Jang, Yunchang, Roh, Hyun-Joon, Park, Seolhye, Jeong, Sangmin, Ryu, Sanywon, Kwon, Ji-Won, Kim, Nam-Kyun, Kim, Gon-Ho
Published in Current applied physics (01.10.2019)
Published in Current applied physics (01.10.2019)
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Journal Article
Optical diagnostics for the highly populated tail of an electron energy distribution function in very-high-frequency capacitively coupled plasma using spin- and dipole-forbidden lines
Roh, Hyun-Joon, Kim, Nam-Kyun, Ryu, Sangwon, Jang, Yunchang, Kim, Gon-Ho
Published in Journal of physics. D, Applied physics (07.06.2017)
Published in Journal of physics. D, Applied physics (07.06.2017)
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Journal Article
Vacuum pump age effects by the exposure to the corrosive gases on the Cr etch rate as observed using optical emission spectroscopy in an Ar/O2/Cl2 mixed plasma
Park, Seolhye, Roh, Hyun-Joon, Jang, Yunchang, Jeong, Sangmin, Ryu, Sangwon, Choe, Jae-Myung, Kim, Gon-Ho
Published in Thin solid films (31.03.2016)
Published in Thin solid films (31.03.2016)
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Journal Article
Ion-neutral collision effect on ion-ion two-stream-instability near sheath-presheath boundary in two-ion-species plasmas
Kim, Nam-Kyun, Song, Jaemin, Roh, Hyun-Joon, Jang, Yunchang, Ryu, Sangwon, Huh, Sung-Ryul, Kim, Gon-Ho
Published in Plasma sources science & technology (28.04.2017)
Published in Plasma sources science & technology (28.04.2017)
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Journal Article
Determination of electron energy probability function in low-temperature plasmas from current – Voltage characteristics of two Langmuir probes filtered by Savitzky–Golay and Blackman window methods
Roh, Hyun-Joon, Kim, Nam-Kyun, Ryu, Sangwon, Park, Seolhye, Lee, Seok-Hwan, Huh, Sung-Ryul, Kim, Gon-Ho
Published in Current applied physics (01.10.2015)
Published in Current applied physics (01.10.2015)
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Journal Article
Characteristics of a non-Maxwellian electron energy distribution in a low-pressure argon plasma
Park, Seolhye, Choe, Jae-Myung, Roh, Hyun-Joon, Kim, Gon-Ho
Published in Journal of the Korean Physical Society (01.06.2014)
Published in Journal of the Korean Physical Society (01.06.2014)
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Journal Article
Laser-Assisted Hα Spectroscopy for Measurement of Negative Ion Density in a Hydrogen Plasma
Huh, Sung-Ryul, Kim, Nam-Kyun, Roh, Hyun-Joon, Kim, Gon-Ho
Published in Fusion science and technology (01.07.2015)
Published in Fusion science and technology (01.07.2015)
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Journal Article
Towards robust UHD video streaming systems using scalable high efficiency video coding
Eun-Seok Ryu, Yeongil Ryu, Hyun-Joon Roh, Joongheon Kim, Bok-Gi Lee
Published in 2015 International Conference on Information and Communication Technology Convergence (ICTC) (01.10.2015)
Published in 2015 International Conference on Information and Communication Technology Convergence (ICTC) (01.10.2015)
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Conference Proceeding
METHOD FOR DIAGNOSING ELECTRON ENERGY DISTRIBUTION FUNCTION OF PLASMA AND METHOD FOR MONITORING THEREOF
ROH, HYUN JOON, RYU, SANG WON, JANG, YUN CHANG, PARK, SEOL HYE, KIM, GON HO
Year of Publication 30.07.2018
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Year of Publication 30.07.2018
Patent