Investigation of NbN and Nb-Si-N Coatings Deposited by Magnetron Sputtering
Ivashchenko, V.I., Scrynskyy, P.L., Lytvyn, O.S., Rogoz, V.M., Sobol, O.V., Kuzmenko, A.P., Comsta, H., Karvat, C.
Published in Acta physica Polonica, A (01.11.2015)
Published in Acta physica Polonica, A (01.11.2015)
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