A laser-generated plasma source for x-ray lithography and VLSI
Michette, A G, Rogoyski, A M, Burge, R E
Published in Journal of physics. E, Scientific instruments (01.10.1988)
Published in Journal of physics. E, Scientific instruments (01.10.1988)
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Journal Article
Evaluation of a scanning transmission x-ray microscope using undulator radiation at the SERC Daresbury Laboratory
Kenney, J M, Morrison, G R, Browne, M T, Buckley, C J, Burge, R E, Cave, R C, Charalambous, P S, Duke, P J, Hare, A R, Hills, C P B, Michette, A G, Ogawa, K, Rogoyski, A M
Published in Journal of physics. E, Scientific instruments (01.04.1989)
Published in Journal of physics. E, Scientific instruments (01.04.1989)
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Journal Article