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Conference Proceeding
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Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
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Year of Publication 11.07.2007
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Year of Publication 04.08.2022
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Year of Publication 04.08.2022
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Component and method of manufacturing a component using an ultrathin carrier
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Year of Publication 21.06.2022
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Year of Publication 21.06.2022
Patent
SEMICONDUCTOR DEVICE WITH METAL SILICIDE LAYER
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Year of Publication 05.10.2023
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Year of Publication 05.10.2023
Patent