METHOD AND PRECISION NANOPOSITIONING APPARATUS WITH COMPACT VERTICAL AND HORIZONTAL LINEAR NANOPOSITIONING FLEXURE STAGES FOR IMPLEMENTING ENHANCED NANOPOSITIONING PERFORMANCE
Roehig, Christian, Anton, Jayson W, Kearney, Stephen P, Maser, Jorg M, Shu, Deming, Lai, Barry, Liu, Wenjun, Tischler, Jonathan Z
Year of Publication 31.01.2019
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Year of Publication 31.01.2019
Patent