Novel Anionic Photoacid Generators (PAGs) and Corresponding PAG Bound Polymers
Wang, Mingxing, Gonsalves, Kenneth E., Yueh, Wang, Roberts, Jeanette M.
Published in Macromolecular rapid communications. (22.09.2006)
Published in Macromolecular rapid communications. (22.09.2006)
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Journal Article
PAG Incorporated Polymeric Resists for Sub-100 nm Patterning at 193 nm Exposure
Jarnagin, Nathan D., Wang, Mingxing, Rabinobich, Monica, Roberts, Jeanette M., Yueh, Wang, Batina, Nikola, Gonsalves, Kenneth E.
Published in Journal of Photopolymer Science and Technology (01.01.2006)
Published in Journal of Photopolymer Science and Technology (01.01.2006)
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The effect of direct PAG incorporation into the polymer main chain on reactive ion etch resistance of 193 nm and EUV chemically amplified resists
LEE, Cheng-Tsung, HENDERSON, Clifford L, MINGXING WANG, GONSALVES, Kenneth E, YUEH, Wang, ROBERTS, Jeanette M
Published in Microelectronic engineering (01.05.2008)
Published in Microelectronic engineering (01.05.2008)
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Conference Proceeding
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GEORGE HUBERT C, ROBERTS JEANETTE M, THOMAS NICOLE K, ELSHERBINI ADEL A, CLARKE JAMES S, PILLARISETTY RAVI
Year of Publication 09.05.2019
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Year of Publication 09.05.2019
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GEORGE HUBERT C, ROBERTS JEANETTE M, THOMAS NICOLE K, CLARKE JAMES S, PILLARISETTY RAVI, BRISTOL ROBERT L
Year of Publication 20.03.2019
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Year of Publication 20.03.2019
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마이크로 전자 도전성 경로들 및 이를 제조하는 방법
HOURANI RAMI, KOBRINSKY MAURO J, ROBERTS JEANETTE M, CLENDENNING SCOTT B, CHAWLA JASMEET S, GSTREIN FLORIAN
Year of Publication 08.01.2018
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Year of Publication 08.01.2018
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SELECTIVE DIFFUSION BARRIER BETWEEN METALS OF AN INTEGRATED CIRCUIT DEVICE
ROBERTS JEANETTE M, CLENDENNING SCOTT B, CHEBIAM RAMANAN V, JEZEWSKI CHRISTOPHER J, ROMERO PATRICIO E
Year of Publication 15.02.2017
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Year of Publication 15.02.2017
Patent
Incorporation of ionic photoacid generator (PAG) and base quencher into the resist polymer main chain for sub-50 nm resolution patterning
MINGXING WANG, LEE, Cheng-Tsung, HENDERSON, Clifford L, YUEH, Wang, ROBERTS, Jeanette M, GONSALVES, Kenneth E
Published in Journal of materials chemistry (01.01.2008)
Published in Journal of materials chemistry (01.01.2008)
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Journal Article
FORMING LAYERS OF MATERIALS OVER SMALL REGIONS BY SELECTIVE CHEMICAL REACTION INCLUDING LIMITING ENCROACHMENT OF THE LAYERS OVER ADJACENT REGIONS
BLACKWELL JAMES M, HOURANI RAMI, ROBERTS JEANETTE M, CLENDENNING SCOTT B, KLOSTER GRANT M, HAN EUNGNAK, GSTREIN FLORIAN, ROMERO PATRICIO E, BRISTOL ROBERT L
Year of Publication 01.06.2016
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Year of Publication 01.06.2016
Patent
The effect of direct PAG incorporation into the polymer main chain on reactive ion etch resistance of 193nm and EUV chemically amplified resists
Lee, Cheng-Tsung, Henderson, Clifford L., Wang, Mingxing, Gonsalves, Kenneth E., Yueh, Wang, Roberts, Jeanette M.
Published in Microelectronic engineering (01.05.2008)
Published in Microelectronic engineering (01.05.2008)
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Journal Article
Quantum dot devices
Thomas, Nicole K, Roberts, Jeanette M, Clarke, James S, George, Hubert C, Pillarisetty, Ravi
Year of Publication 30.05.2023
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Year of Publication 30.05.2023
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Quantum dot devices with top gates
Michalak, David J, Roberts, Jeanette M, Clarke, James S, Pillarisetty, Ravi, Yoscovits, Zachary R
Year of Publication 07.02.2023
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Year of Publication 07.02.2023
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Quantum computing assemblies
Roberts, Jeanette M, Clarke, James S, Liff, Shawna M, Elsherbini, Adel A
Year of Publication 08.11.2022
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Year of Publication 08.11.2022
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Quantum dot based qubit devices with on-chip microcoil arrangements
Subramanian, Sushil, Schaal, Simon, Watson, Thomas Francis, Roberts, Jeanette M, George, Hubert C, Borjans, Felix Frederic Leonhard, Luethi, Florian, Lampert, Lester, Pellerano, Stefano, Park, Jong Seok
Year of Publication 30.07.2024
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Year of Publication 30.07.2024
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QUANTUM DOT DEVICES
Thomas, Nicole K, Roberts, Jeanette M, Clarke, James S, George, Hubert C, Pillarisetty, Ravi, Yoscovits, Zachary R
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
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QUANTUM DOT DEVICES WITH FINS
Michalak, David J, Roberts, Jeanette M, Le, Van H, Clarke, James S, Pillarisetty, Ravi, Yoscovits, Zachary R
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
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Interconnects for quantum dot devices
Michalak, David J, Roberts, Jeanette M, Clarke, James S, Pillarisetty, Ravi, Yoscovits, Zachary R
Year of Publication 20.09.2022
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Year of Publication 20.09.2022
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Quantum dot devices with trenched substrates
Michalak, David J, Le, Van H, Roberts, Jeanette M, Clarke, James S, Pillarisetty, Ravi, Yoscovits, Zachary R
Year of Publication 08.08.2023
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Year of Publication 08.08.2023
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Quantum dot devices with fins
Michalak, David J, Roberts, Jeanette M, Le, Van H, Clarke, James S, Pillarisetty, Ravi, Yoscovits, Zachary R
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
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