Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay
Riverola, M., Uranga, A., Torres, F., Barniol, N.
Published in Microelectronic engineering (15.05.2018)
Published in Microelectronic engineering (15.05.2018)
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Journal Article
A monolithically integrated torsional CMOS-MEMS relay
Riverola, M, Sobreviela, G, Torres, F, Uranga, A, Barniol, N
Published in Journal of micromechanics and microengineering (05.10.2016)
Published in Journal of micromechanics and microengineering (05.10.2016)
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Journal Article
Noise effects on resonator bias polarization in CMOS-MEMS oscillators
Sobreviela, G., Riverola, M., Uranga, A., Barniol, N.
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
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Conference Proceeding
Torwards a fully-integrated CMOS microcalorimeter with on-chip quasi-digital output signal
Munoz-Contreras, F., Verd, J., Segura, J., Uranga, A., Riverola, M., Barniol, N.
Published in 2013 IEEE SENSORS (01.11.2013)
Published in 2013 IEEE SENSORS (01.11.2013)
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Conference Proceeding
Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resonators with noise-matched high-gain transimpedance CMOS amplifier
Sobreviela, G., Riverola, M., Torres, F., Uranga, A., Barniol, N.
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding
Design of self-sustained CMOS amplifiers for all-CMOS MEMS based oscillators
Uranga, A., Sobreviela, G., Riverola, M., Torres, F., Barniol, N.
Published in 2016 IEEE International Conference on Electronics, Circuits and Systems (ICECS) (01.12.2016)
Published in 2016 IEEE International Conference on Electronics, Circuits and Systems (ICECS) (01.12.2016)
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Conference Proceeding
A reliable fast miniaturized RF MEMS-on-CMOS switched capacitor with zero-level vacuum package
Riverola, M., Uranga, A., Torres, F., Barniol, N., Marigo, E., Soundara-Pandian, M.
Published in 2017 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) (01.09.2017)
Published in 2017 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) (01.09.2017)
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Conference Proceeding
Passive temperature compensation method in nonlinear NEMS resonators based on the nonlinear duffing effect
Sobreviela, G., Riverola, M., Uranga, A., Barniol, N., Marigo, E., Soundara-Pandian, M.
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
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Conference Proceeding