Simultaneous qualitative analysis of volatile and nonvolatile organic contamination on silicon wafer by online pyrolysis mass spectrometry
Ketola, R.A., Kiuru, J., Tarkiainen, V., Kiviranta, A., Rasanen, J., Ritala, H., Eranen, S.
Published in IEEE transactions on device and materials reliability (01.12.2005)
Published in IEEE transactions on device and materials reliability (01.12.2005)
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Magazine Article
Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition
Puurunen, R. L., Haara, A., Ritala, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamaki, J., Santala, E., Leskela, M., Kattelus, H.
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
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Conference Proceeding