Strain mapping and simulation of transistor structures in a 22nm FDSOI technology
Utess, Dirk, Kleimaier, Dominik Martin, Billan, Etienne, Youssuf, Tashfain, Zhao, Zhixing, Nemec, Thorgund, Meyer, Moritz Andreas, Rinderknecht, Jochen
Published in BIO web of conferences (2024)
Published in BIO web of conferences (2024)
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Journal Article
Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy
Hermann, Peter, Hecker, Michael, Chumakov, Dmytro, Weisheit, Martin, Rinderknecht, Jochen, Shelaev, Artem, Dorozhkin, Pavel, Eng, Lukas M.
Published in Ultramicroscopy (01.11.2011)
Published in Ultramicroscopy (01.11.2011)
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Journal Article
In situ high-temperature synchrotron-radiation diffraction studies of Ni and Co–Ni silicidation processes
Rinderknecht, J, Prinz, H, Kammler, T, Berberich, F, Zschech, E
Published in Microelectronic engineering (01.10.2002)
Published in Microelectronic engineering (01.10.2002)
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Journal Article
Conference Proceeding
Understanding the materials, electrical and reliability impact of Al-addition to ZrO2 for BEOL compatible MIM capacitors
Triyoso, Dina H., Chu, Sanford, Seidel, Konrad, Weinreich, Wenke, Kok-Yong Yiang, Nolan, Mark G., Brunco, David P., Rinderknecht, Jochen, Utess, Dirk, Kyono, Carl, Miller, Rod, Jeasung Park, Lili Cheng, Liebau, Maik, Lomtscher, Patrick, Fox, Robert
Published in Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2014)
Published in Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2014)
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Conference Proceeding