Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
Riazanova, A V, Costanzi, B N, Aristov, A, Rikers, Y G M, Ström, V, Mulders, J J L, Kabashin, A V, Dahlberg, E Dan, Belova, L M
Published in Nanotechnology (18.04.2014)
Published in Nanotechnology (18.04.2014)
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Journal Article
Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide
Riazanova, A V, Costanzi, B N, Aristov, A I, Rikers, Y G M, Mulders, J J L, Kabashin, A V, Dahlberg, E Dan, Belova, L M
Published in Nanotechnology (18.03.2016)
Published in Nanotechnology (18.03.2016)
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Journal Article
Layer-by-layer 3D printing of Si micro- and nanostructures by Si deposition, ion implantation and selective Si etching
Fischer, A. C., Gylfason, K. B., Belova, L. M., Malm, B. G., Radamson, H. H., Kolahdouz, M., Rikers, Y. G. M., Stemme, G., Niklaus, F.
Published in 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) (01.08.2012)
Published in 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) (01.08.2012)
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