Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentation
Ovchinnikov, I. S, Vishnevskiy, A. S, Seregin, D. S, Rezvanov, A. A, Schneider, D, Sigov, A. S, Vorotilov, K. A, Baklanov, M. R
Published in Langmuir (18.08.2020)
Published in Langmuir (18.08.2020)
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Journal Article
Biotechnology of wastewater treatment of dairy industry enterprises
Smolyanichenko, A S, Yakovleva, E V, Rezvanov, A A, Rezvanov, M A
Published in IOP conference series. Earth and environmental science (01.02.2022)
Published in IOP conference series. Earth and environmental science (01.02.2022)
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Journal Article
Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
Zotovich, A, Rezvanov, A, Chanson, R, Zhang, L, Hacker, N, Kurchikov, K, Klimin, S, Zyryanov, S M, Lopaev, D, Gornev, E, Clemente, I, Miakonkikh, A, Maslakov, K
Published in Journal of physics. D, Applied physics (19.07.2018)
Published in Journal of physics. D, Applied physics (19.07.2018)
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Journal Article
Computer Modeling of Plasma-Enhanced Atomic Layer Deposition of HfO2 and ZrO2
Zyuzin, S. S., Ganykina, E. A., Rezvanov, A. A., Zasseev, Ya. G., Gvozdev, V. A., Gornev, E. S.
Published in Russian microelectronics (01.12.2023)
Published in Russian microelectronics (01.12.2023)
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Journal Article
Dielectric Barrier in the Subtractive Process of Formation of a Copper Metallization System
Orlov, A. A., Rezvanov, A. A., Gvozdev, V. A., Orlov, G. A., Seregin, D. S., Kuznetsov, P. I., Blumberg, T., Veselov, A. A., Suzuki, T., Morozov, E. N., Vorotilov, K. A.
Published in Russian microelectronics (01.12.2022)
Published in Russian microelectronics (01.12.2022)
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Journal Article
Modeling the Dynamics of the Integral Dielectric Permittivity of a Porous Low-K Organosilicate Film during the Dry Etching of a Photoresist in O2 Plasma
Rezvanov, A. A., Matyushkin, I. V., Gushchin, O. P., Gornev, E. S.
Published in Russian microelectronics (01.11.2018)
Published in Russian microelectronics (01.11.2018)
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Journal Article
Mechanical Properties of Low-k Dielectric Deposited on Subtractively Patterned Cu Lines for Advanced Interconnects
Ovchinnikov, I. S., Seregin, D. S., Abdullaev, D. A., Vorotilov, K. A., Rezvanov, A. A., Gvozdev, V. A., Blomberg, T., Veselov, A. A., Baklanov, M. R.
Published in 2021 IEEE International Interconnect Technology Conference (IITC) (06.07.2021)
Published in 2021 IEEE International Interconnect Technology Conference (IITC) (06.07.2021)
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Conference Proceeding
Area selective grafting of siloxane molecules on low-k dielectric with respect to copper surface
Rezvanov, A., Gornev, E.S., de Marneffe, J.-F., Armini, S.
Published in Applied surface science (15.05.2019)
Published in Applied surface science (15.05.2019)
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Journal Article
Gas Phase Pore Stuffing for the protection of organo-silicate glass dielectric materials
Fujikawa, M., Sato, N., de Marneffe, J. -F., Chanson, R., Gavan, K.Babaei, Rezvanov, A., Lazzarino, F., Tokei, Z., Yamaguchi, T., Nozawa, S.
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding
WEB APPLICATION FRONT END QUALITY MODEL
A. V. Rezvanov, V. V. Bakhtizin
Published in Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (01.06.2019)
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Published in Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (01.06.2019)
Journal Article
Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission
Zotovich, Alexey I., Zyryanov, Sergey M., Lopaev, Dmitry V., Rezvanov, Askar A., Attallah, Ahmed G., Liedke, Maciej O., Butterling, Maik, Bogdanova, Maria A., Vishnevskiy, Alexey S., Seregin, Dmitry S., Vorotyntsev, Dmitry A., Palov, Alexander P., Hirschmann, Eric, Wagner, Andreas, Naumov, Sergej, Vorotilov, Konstantin A., Rakhimova, Tatyana V., Rakhimov, Alexander T., Baklanov, Mikhail R.
Published in ACS applied electronic materials (28.06.2022)
Published in ACS applied electronic materials (28.06.2022)
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Journal Article
SAT0432 Study of Polymorphism of 1377 C>T Calcitonin Receptor Gene in Patients with Osteoarthritis and with Osteoporosis
Rizamukhamedova, M.Z., Boboev, N.M., Karimov, H.Y., Ibragimov, Z.Z., Rezvanov, A.S., Boboev, K.T.
Published in Annals of the rheumatic diseases (01.06.2014)
Published in Annals of the rheumatic diseases (01.06.2014)
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Journal Article
Beamforming by magnetostatic wave microstrip antennas
Rezvanov, A.G., Zagriadski, S.V.
Published in IEEE Antennas and Propagation Society International Symposium. 1999 Digest. Held in conjunction with: USNC/URSI National Radio Science Meeting (Cat. No.99CH37010) (1999)
Published in IEEE Antennas and Propagation Society International Symposium. 1999 Digest. Held in conjunction with: USNC/URSI National Radio Science Meeting (Cat. No.99CH37010) (1999)
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Conference Proceeding