The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
Reuter, Rüdiger, Rügner, Katja, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan
Published in Plasma processes and polymers (01.12.2012)
Published in Plasma processes and polymers (01.12.2012)
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Journal Article
Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects
Baloniak, Tim, Reuter, Rüdiger, von Keudell, Achim
Published in Journal of physics. D, Applied physics (25.08.2010)
Published in Journal of physics. D, Applied physics (25.08.2010)
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Journal Article
Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
Rügner, Katja, Reuter, Rüdiger, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan
Published in Plasma processes and polymers (01.12.2013)
Published in Plasma processes and polymers (01.12.2013)
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Journal Article
Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low-Pressure Ar/O2 ICP Discharges
Kylián, Ondřej, Benedikt, Jan, Sirghi, Lucel, Reuter, Rüdiger, Rauscher, Hubert, von Keudell, Achim, Rossi, François
Published in Plasma processes and polymers (03.04.2009)
Published in Plasma processes and polymers (03.04.2009)
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Journal Article
Very sensitive real-time inline process mass spectrometer based on FFT Ion Trap technique
Chung, Hin Yiu, Aliman, Michel, Fedosenko, Gennady, Laue, Alexander, Reuter, Rudiger, Derpmann, Valerie, Gorkhover, Leonid, Antoni, Martin
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low‐Pressure Ar/O 2 ICP Discharges
Kylián, Ondřej, Benedikt, Jan, Sirghi, Lucel, Reuter, Rüdiger, Rauscher, Hubert, von Keudell, Achim, Rossi, François
Published in Plasma processes and polymers (03.04.2009)
Published in Plasma processes and polymers (03.04.2009)
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Journal Article
MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
LAUE, Alexander, GORKHOVER, Leonid, CHUNG, Hin Yiu Anthony, REUTER, Rüdiger, FEDOSENKO, Gennady
Year of Publication 09.02.2022
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Year of Publication 09.02.2022
Patent
MASS SPECTROMETER AND METHOD FOR ANALYSING A GAS BY MASS SPECTROMETRY
ALIMAN, Michel, BENTER, Thorsten, CHUNG, Anthony Hin Yiu, REUTER, Rüdiger, BRACHTHÄUSER, Yessica
Year of Publication 04.08.2021
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Year of Publication 04.08.2021
Patent
MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
LAUE, Alexander, GORKHOVER, Leonid, CHUNG, Hin Yiu Anthony, REUTER, Rüdiger, FEDOSENKO, Gennady
Year of Publication 08.10.2020
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Year of Publication 08.10.2020
Patent
METHOD FOR REAL-TIME MONITORING OF A PROCESS AND MASS SPECTROMETER
ALIMAN, Michel, LAUE, Alexander, GORUS, Andreas, ANTONI, Martin, GORKHOVER, Leonid, LUNDQUIST, Theodore, CHUNG, Hin Yiu Anthony, DERPMANN, Valerie, REUTER, Rüdiger, FEDOSENKO, Gennady
Year of Publication 07.04.2021
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Year of Publication 07.04.2021
Patent
METHOD FOR REAL-TIME MONITORING OF A PROCESS AND MASS SPECTROMETER
ALIMAN, Michel, LAUE, Alexander, GORUS, Andreas, ANTONI, Martin, GORKHOVER, Leonid, LUNDQUIST, Theodore, CHUNG, Hin Yiu Anthony, DERPMANN, Valerie, REUTER, Rüdiger, FEDOSENKO, Gennady
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
Patent
The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure: Cold Atmospheric Plasmas
REUTER, Rudiger, RÜGNER, Katja, ELLERWEG, Dirk, DE LOS ARCOS, Teresa, KEUDELL, Achim Von, BENEDIKT, Jan
Published in Plasma processes and polymers (2012)
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Published in Plasma processes and polymers (2012)
Journal Article
IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
ALIMAN, Michel, LAUE, Alexander, BENTER, Thorsten, BÖKE, Marc, GORKHOVER, Leonid, KEUDELL, Achim von, WINTER, Jörg, CHUNG, Hin Yiu Anthony, REUTER, Rüdiger, FEDOSENKO, Gennady, AWAKOWICZ, Peter
Year of Publication 26.09.2018
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Year of Publication 26.09.2018
Patent
METHOD FOR REAL-TIME MONITORING OF A PROCESS AND MASS SPECTROMETER
ALIMAN, Michel, LAUE, Alexander, GORUS, Andreas, ANTONI, Martin, GORKHOVER, Leonid, LUNDQUIST, Theodore, CHUNG, Hin Yiu Anthony, DERPMANN, Valerie, REUTER, Rüdiger, FEDOSENKO, Gennady
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent
IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
ALIMAN, Michel, LAUE, Alexander, BENTER, Thorsten, BÖKE, Marc, GORKHOVER, Leonid, KEUDELL, Achim von, WINTER, Jörg, CHUNG, Hin Yiu Anthony, REUTER, Rüdiger, FEDOSENKO, Gennady, AWAKOWICZ, Peter
Year of Publication 25.10.2017
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Year of Publication 25.10.2017
Patent