Lithography
Neisser, Mark, Levinson, Harry J., Wurm, Stefan, Kyser, David, Watanabe, Takeo, Macwilliams, Ken, Ishiuchi, Hidemi, Trybula, Walt, Hayashi, Naoya, Fedynyshyn, Ted, Higgins, Craig, Nakamura, Tsuyoshi, Resnick, Doug, Preil, Moshe, Lercel, Michael, Aoyama, Hajime, Hosler, Erik
Published in 2021 IEEE International Roadmap for Devices and Systems Outbriefs (01.11.2021)
Published in 2021 IEEE International Roadmap for Devices and Systems Outbriefs (01.11.2021)
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Conference Proceeding
Proceedings of the Symposium and Summer School on: Nano and Giga Challenges in Microelectronics Research and Opportunities in Russia
ARONZON, Boris, DEMKOV, Alex, GOLANT, Konstantin, GREER, Jim, GUSEV, Evgeni, KORKIN, Anatoli, LABANOWSKI, Jan, RESNICK, Doug
Published in Microelectronic engineering (2003)
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Published in Microelectronic engineering (2003)
Conference Proceeding
Method of fabricating a tiered structure using a multi-layered resist stack and use
GEHOSKI, KATHLEEN ANN, POPOVICH, LAURA, RESNICK, DOUG J, MANCINI, DAVID P
Year of Publication 21.02.2007
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Year of Publication 21.02.2007
Patent