Temporary Wafer Bonding by Polyelectrolyte Interlayers
Eichler, Marko, Dillmann, Helena, Reim, Leo Clemens, Thomas, Michael, Klages, Claus-Peter
Published in ECS transactions (14.08.2014)
Published in ECS transactions (14.08.2014)
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Journal Article
Temporary Wafer Bonding by Polyelectrolyte Interlayers
Eichler, Marko, Dillmann, Helena, Reim, Leo Clemens, Thomas, Michael, Klages, Claus-Peter
Published in Meeting abstracts (Electrochemical Society) (05.08.2014)
Published in Meeting abstracts (Electrochemical Society) (05.08.2014)
Get full text
Journal Article