The Effect of Multi-Directional Stimuli on the Stiction-Induced Failure Behavior of MEMS
Naumann, Michael, Regmi, Tripti, Canales, Eduardo, Jones, Peter
Published in Journal of microelectromechanical systems (01.06.2016)
Published in Journal of microelectromechanical systems (01.06.2016)
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Journal Article
Controlled pulse generation methods and apparatuses for evaluating stiction in microelectromechanical systems devices
Jones, Peter T, Shipman, John, Naumann, Michael, Regmi, Tripti, Metzler, Larry D, McWhorter, William D, Krueger, Chad, Salian, Arvind
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
Patent