Effect of composition inhomogeneity in a-SioxNy thin films on their optical properties
REBIB, Farida, TOMASELLA, Eric, MICHELI, Victor, EYPERT, Celine, CELLIER, Joel, LAIDANI, Nadhira
Published in Optical materials (2009)
Published in Optical materials (2009)
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Conference Proceeding
Journal Article
Structural and Optical Investigations of Silicon Carbon Nitride Thin Films Deposited by Magnetron Sputtering
Tomasella, Eric, Spinelle, Laurent, Bousquet, Angélique, Rebib, Farida, Dubois, Marc, Eypert, Céline, Gaston, Jean Paul, Cellier, Joel, Sauvage, Thierry
Published in Plasma processes and polymers (01.06.2009)
Published in Plasma processes and polymers (01.06.2009)
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Journal Article
Influence of the Structure of a-SiOxNy Thin Films on Their Electrical Properties
Rebib, Farida, Tomasella, Eric, Aida, Salah, Dubois, Marc, Bêche, Eric, Cellier, Joel, Jacquet, Michel
Published in Plasma processes and polymers (01.04.2007)
Published in Plasma processes and polymers (01.04.2007)
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Journal Article
Study of Reactive RF Sputtering Process of Silicon Target Under ArO2N2 Atmospheres
Rebib, Farida, Tomasella, Eric, Thomas, Laurent, Cellier, Joel, Sauvage, Thierry, Jacquet, Michel
Published in Plasma processes and polymers (01.04.2007)
Published in Plasma processes and polymers (01.04.2007)
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Journal Article
Mechanical Study of High Resistance Silicon Carbide Based Multi-Nano-Layers Grown by Multifrequency PACVD
Rebib, Farida, Gaudy, Thomas, Soum-Glaude, Audrey, Caron, Isabelle, Da Silva, Tony, Picard, Christine, Cournut, Fabienne, Thomas, Laurent
Published in Plasma processes and polymers (01.06.2009)
Published in Plasma processes and polymers (01.06.2009)
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Journal Article