SiOxNy thin films deposited by reactive sputtering : Process study and structural characterisation
REBIB, F, TOMASELLA, E, DUBOIS, M, CELLIER, J, SAUVAGE, T, JACQUET, M
Published in Thin solid films (26.02.2007)
Published in Thin solid films (26.02.2007)
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Journal Article
FTIR and XPS investigations of a-SiOxNy thin films structure
Rebib, F, Tomasella, E, Bêche, E, Cellier, J, Jacquet, M
Published in Journal of physics. Conference series (01.03.2008)
Published in Journal of physics. Conference series (01.03.2008)
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Journal Article
Structural and optical investigations of SiOxNy thin films deposited by R.F. sputtering
Rebib, F., Tomasella, E., Dubois, M., Cellier, J., Sauvage, T., Jacquet, M.
Published in Surface & coatings technology (01.10.2005)
Published in Surface & coatings technology (01.10.2005)
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Journal Article
Conference Proceeding
Structural and optical properties studies of sputtered a-SiCN thin films
Tomasella, E, Rebib, F, Dubois, M, Cellier, J, Jacquet, M
Published in Journal of physics. Conference series (01.03.2008)
Published in Journal of physics. Conference series (01.03.2008)
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Journal Article
Determination of optical properties of a-SiOxNy thin films by ellipsometric and UV-visible spectroscopies
Rebib, F, Tomasella, E, Gaston, J P, Eypert, C, Cellier, J, Jacquet, M
Published in Journal of physics. Conference series (01.03.2008)
Published in Journal of physics. Conference series (01.03.2008)
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Journal Article
Optical emission spectroscopy investigation of sputtering discharge used for SiOxNy thin films deposition and correlation with the film composition
REBIB, F, TOMASELLA, E, THOMAS, L, CELLIER, J, SAUVAGE, T, JACQUET, M
Published in Applied surface science (30.05.2006)
Published in Applied surface science (30.05.2006)
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Conference Proceeding
Journal Article
Electrical behaviour of SiOxNy thin films and correlation with structural defects
REBIB, F, TOMASELLA, E, AIDA, S, DUBOIS, M, CELLIER, J, JACQUET, M
Published in Applied surface science (30.05.2006)
Published in Applied surface science (30.05.2006)
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Conference Proceeding
Journal Article
Optical emission spectroscopy investigation of sputtering discharge used for SiO x N y thin films deposition and correlation with the film composition
Rebib, F., Tomasella, E., Thomas, L., Cellier, J., Sauvage, T., Jacquet, M.
Published in Applied surface science (30.05.2006)
Published in Applied surface science (30.05.2006)
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Journal Article
Electrical behaviour of SiO x N y thin films and correlation with structural defects
Rebib, F., Tomasella, E., Aida, S., Dubois, M., Cellier, J., Jacquet, M.
Published in Applied surface science (30.05.2006)
Published in Applied surface science (30.05.2006)
Get full text
Journal Article
FTIR and XPS investigations of a-SiO x N y thin films structure
Rebib, F, Tomasella, E, Bêche, E, Cellier, J, Jacquet, M
Published in Journal of physics. Conference series (01.03.2008)
Published in Journal of physics. Conference series (01.03.2008)
Get full text
Journal Article