ROTATING SUSCEPTOR SEMICONDUCTOR WAFER PROCESSING CLUSTER TOOL MODULE USEFUL FOR TUNGSTEN CVD
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Year of Publication 25.04.2000
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Year of Publication 25.04.2000
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ROTATING SUSCEPTOR SEMICONDUCTOR WAFER PROCESSING CLUSTER TOOL MODULE USEFUL FOR TUNGSTEN CVD
REBENNE, HELEN E, LEBLANC, RENE E, WHITE, CARL L, FOSTER, ROBERT F, ARORA, RIKHIT
Year of Publication 13.01.1999
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Year of Publication 13.01.1999
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Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten cvd
ARORA RIKHIT, LEBLANC, RENE, E, REBENNE, HELEN, E, WHITE, CARL, L, FOSTER, ROBERT, F
Year of Publication 16.11.1998
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Year of Publication 16.11.1998
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SEMICONDUCTOR WAFER PROCESSING METHOD AND APPARATUS WITH HEAT AND GAS FLOW CONTROL
ARORA, RIKHIT, LEBLANC, RENE, E, REBENNE, HELEN, E, FOSTER, ROBERT, F, WHITE, CARL, L
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Year of Publication 04.11.1998
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Year of Publication 18.12.1996
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Year of Publication 18.12.1996
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SEMICONDUCTOR WAFER PROCESSING METHOD AND APPARATUS WITH HEAT AND GAS FLOW CONTROL
ARORA, RIKHIT, LEBLANC, RENE, E, REBENNE, HELEN, E, FOSTER, ROBERT, F, WHITE, CARL, L
Year of Publication 05.04.1995
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Year of Publication 05.04.1995
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ROTATING SUSCEPTOR SEMICONDUCTOR WAFER PROCESSING CLUSTER TOOL MODULE USEFUL FOR TUNGSTEN CVD
REBENNE, HELEN E, LEBLANC, RENE E, WHITE, CARL L, FOSTER, ROBERT F, ARORA, RIKHIT
Year of Publication 29.03.1995
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Year of Publication 29.03.1995
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Year of Publication 29.03.1995
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Year of Publication 29.03.1995
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Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD
WHITE; CARL L, LEBLANC; RENE E, REBENNE; HELEN E, FOSTER; ROBERT F, ARORA; RIKHIT
Year of Publication 06.12.1994
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Year of Publication 06.12.1994
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