Tri-axial high-g CMOS-MEMS capacitive accelerometer array
Wung, A., Park, R.V., Rebello, K.J., Fedder, G.K.
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
Published in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (01.01.2008)
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Conference Proceeding
A MEMS sensor for low-frequency vibration energy harvesting
Moses, M. S., Wester, B. A., Brown, C. Y., Kutzer, M. D., Kucher, P. R., Rebello, K. J.
Published in 2012 Microsystems for Measurement and Instrumentation (MAMNA) (01.03.2012)
Published in 2012 Microsystems for Measurement and Instrumentation (MAMNA) (01.03.2012)
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