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Deep-reactive ion etching of silicon nanowire arrays at cryogenic temperatures
Xu, Jiushuai, Refino, Andam Deatama, Delvallée, Alexandra, Seibert, Sebastian, Schwalb, Christian, Hansen, Poul Erik, Foldyna, Martin, Siaudinyte, Lauryna, Hamdana, Gerry, Wasisto, Hutomo Suryo, Kottmeier, Jonathan, Dietzel, Andreas, Weimann, Thomas, Prüssing, Jan Kristen, Bracht, Hartmut, Peiner, Erwin
Published in Applied physics reviews (01.06.2024)
Published in Applied physics reviews (01.06.2024)
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Reactive ion etching of indium-tin oxide films by CCl4-based Inductivity Coupled Plasma
Juneja, Sucheta, Poletayev, Sergey D, Fomchenkov, Sergey, Khonina, Svetlana N, Skidanov, Roman V, Kazanskiy, Nikolay L
Published in Journal of physics. Conference series (01.08.2016)
Published in Journal of physics. Conference series (01.08.2016)
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Flexible PZT-Based Row-Column Addressed 2-D PMUT Array
Joshi, Sanjog Vilas, Sadeghpour, Sina, Kraft, Michael
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.11.2024)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.11.2024)
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Scalable Fabrication of High Purity Diamond Nanocrystals with Long-Spin-Coherence Nitrogen Vacancy Centers
Trusheim, Matthew E, Li, Luozhou, Laraoui, Abdelghani, Chen, Edward H, Bakhru, Hassaram, Schröder, Tim, Gaathon, Ophir, Meriles, Carlos A, Englund, Dirk
Published in Nano letters (08.01.2014)
Published in Nano letters (08.01.2014)
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Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper
Belfiore, Nicola Pio, Bagolini, Alvise, Rossi, Andrea, Bocchetta, Gabriele, Vurchio, Federica, Crescenzi, Rocco, Scorza, Andrea, Bellutti, Pierluigi, Sciuto, Salvatore Andrea
Published in Micromachines (Basel) (17.10.2021)
Published in Micromachines (Basel) (17.10.2021)
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Nanoporous structures by reactive ion etching
Bruce, Robert L, Astier, Yann, Bai, Jingwei, Franklin, Aaron D, Smith, Joshua T
Year of Publication 22.05.2018
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Year of Publication 22.05.2018
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A dimensional comparison between embedded 3D-printed and silicon microchannels
O'Connor, J, Punch, J, Jeffers, N, Stafford, J
Published in Journal of physics. Conference series (01.01.2014)
Published in Journal of physics. Conference series (01.01.2014)
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Nanoporous structures by reactive ion etching
BRUCE ROBERT L, ASTIER YANN, BAI JINGWEI, FRANKLIN AARON D, SMITH JOSHUA T
Year of Publication 25.08.2015
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Year of Publication 25.08.2015
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NANOPOROUS STRUCTURES BY REACTIVE ION ETCHING
BRUCE ROBERT L, ASTIER YANN, BAI JINGWEI, FRANKLIN AARON D, SMITH JOSHUA T
Year of Publication 24.09.2015
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Year of Publication 24.09.2015
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Sophisticated process for a spin-torque device fabricated from a pillar containing two different ferromagnetic materials separated by a non-magnetic layer
Samiepour, M., Gerhard, F., Borzenko, T., Gould, C., Molenkamp, L.W.
Published in Microelectronic engineering (01.05.2014)
Published in Microelectronic engineering (01.05.2014)
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NANOPOROUS STRUCTURES BY REACTIVE ION ETCHING
BRUCE ROBERT L, ASTIER YANN, BAI JINGWEI, FRANKLIN AARON D, SMITH JOSHUA T
Year of Publication 18.12.2014
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Year of Publication 18.12.2014
Patent
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Crystalline silicon solar battery RIE (reactive ion etching) velvet making device
SUN JIFENG, JIANG YANSEN, CHENG LIANG, ZHANG CHUNYAN, JIA HESHUN, MA JILEI, REN XIANKUN, LI BINGLIN
Year of Publication 20.05.2015
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Year of Publication 20.05.2015
Patent