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Rau, W.D., Schwander, P., Ourmazd, A.
Published in Physica status solidi. B. Basic research (01.11.2000)
Published in Physica status solidi. B. Basic research (01.11.2000)
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Progress on the realization of the electron column modules for SCALPEL high-throughput/alpha electron projection lithography tools
Stenkamp, D., Kienzle, O., Orchowski, A., Rau, W.D., Weickenmeier, A., Benner, G., Wetzke, M., Waskiewicz, W., Katsap, V., Zhu, X., Liu, H., Munro, E., Rouse, J.A.
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Published in Microelectronic engineering (01.09.2001)
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