Effect of particles and contaminants on the static response of a rectangular MEMS diaphragm due to adverse clean room environment - Simulation studies
Vutla, Srinivasa Rao, Patnaik, Prasant Kumar, Ramaswamy, Karman, Regalla, Srinivasa Prakash, Srinivas, M. B.
Published in 2013 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia) (01.12.2013)
Published in 2013 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia) (01.12.2013)
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