The fabrication of electrical linewidth structures capable of TEM measurement using standard wafers
Munro, C.G., Gundlach, A.M., Stevenson, J.T.M., Travis, D.W., Smith, S., Rankin, N.S., Walton, A.J.
Published in ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307) (1999)
Published in ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307) (1999)
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Conference Proceeding
Statistical SPICE analysis of a 0.18 /spl mu/m CMOS digital/analog technology during process development
Rankin, N.S., Chun Ng, Leang Sern Ee, Boyland, F., Quek, E., Leung Ying Keung, Walton, A.J., Redford, M.
Published in ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) (2001)
Published in ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) (2001)
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Conference Proceeding