Atomic Layer Deposition of Gd2O3 and Dy2O3: A Study of the ALD Characteristics and Structural and Electrical Properties
Xu, Ke, Ranjith, Ramdurai, Laha, Apurba, Parala, Harish, Milanov, Andrian P, Fischer, Roland A, Bugiel, Eberhard, Feydt, Jürgen, Irsen, Stefan, Toader, Teodor, Bock, Claudia, Rogalla, Detlef, Osten, Hans-Jörg, Kunze, Ulrich, Devi, Anjana
Published in Chemistry of materials (28.02.2012)
Published in Chemistry of materials (28.02.2012)
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Journal Article
Atomic Layer Deposition of Gd 2 O 3 and Dy 2 O 3 : A Study of the ALD Characteristics and Structural and Electrical Properties
Xu, Ke, Ranjith, Ramdurai, Laha, Apurba, Parala, Harish, Milanov, Andrian P., Fischer, Roland A., Bugiel, Eberhard, Feydt, Jürgen, Irsen, Stefan, Toader, Teodor, Bock, Claudia, Rogalla, Detlef, Osten, Hans-Jörg, Kunze, Ulrich, Devi, Anjana
Published in Chemistry of materials (28.02.2012)
Published in Chemistry of materials (28.02.2012)
Get full text
Journal Article