Higher order FFSFR coupled micromechanical mixer-filters integrated in CMOS
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Conference Proceeding
Implementing MEMS resonators in 90 nm CMOS
Ramstad, J. E., Michaelsen, J. A., Soeraasen, O., Wisland, D.
Published in 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (01.05.2011)
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Published in 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (01.05.2011)
Conference Proceeding