Analytical Evaluation of Thermally Oxidized and Deposited Dielectric in NMOS-PMOS devices
Idris, Muhammad I., Young, R.A.R., Smith, D.A., Weng, Ming Hung, Horsfall, Alton B., Murphy, A.E., Chan, H.K., Ramsay, E.P., Clark, D.T.
Published in Materials Science Forum (24.05.2016)
Published in Materials Science Forum (24.05.2016)
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