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Published in Journal of applied physics (07.01.2013)
Published in Journal of applied physics (07.01.2013)
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D & TOF-SIMS failure analysis of P-buried layer from BiCMOS transistors
Budri, Thanas, Sehgal, Akshey, Arsenault, Scott, Klatt, Jeffrey, Noort, Wibo Van, Ruby, Scott, Ramdani, Jamal, Allard, Paul, Schnieders, Albert
Published in Surface and interface analysis (01.01.2011)
Published in Surface and interface analysis (01.01.2011)
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