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Thin film deposition for permeability increase of gas being implanted (theoretical consideration)
by
Iskanderova, ZA
,
Radjabov, TD
,
Arutjunova, EO
,
Rakhimova
,
GR
Published in
Vacuum
(1985)
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applied sciences
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physics
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condensed matter: structure, mechanical and thermal properties
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defects and impurities in crystals; microstructure
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doping and impurity implantation in iii-v and ii-vi semiconductors
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exact sciences and technology
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materials science
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materials science, multidisciplinary
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